Purification of silane via laser-induced chemistry

ABSTRACT

Impurities such as PH 3 , AsH 3 , and B 2  H 6  may be removed from SiH 4  by means of selective photolysis with ultraviolet radiation of the appropriate wavelength. An ArF laser operating at 193 nm provides an efficient and effective radiation source for the photolysis.

BACKGROUND OF THE INVENTION

The invention described herein relates to a method of purifying silane and more particularly to a method of purifying silane by photolyzing impurities therein and removing the photolysis products.

The technique of laser photochemistry are notable in their ability to selectively excite a single component in a mixture of isotopic or chemical species. The use of laser photochemistry for isotope separation has been well chronicled. However, only recently has attention been given to the possibility of chemical purification using such techniques. The photochemical separation of rare earth mixtures in solution has been achieved with both conventional and laser light sources. In the gas phase, laser-induced conversion of C₂ H₄ Cl₂ and CCl₄ into C₂ H₂, C₂ H₃ Cl, HCl, C₂ Cl₄, and C₂ Cl₆ in the presence of AsCl₃ has been demonstrated. This technique could, in principle, lead to a means of purifying the AsCl₃ of C₂ H₄ Cl₂ and CCl₄ if it were followed by a conventional physical separation process for the photolysis products.

Exceedingly high purity materials are required for the success of most semiconductor manufacturing processes. Impurity levels on the order of parts-per-billion can adversely affect device performance. As a result, a great deal of effort has been expended in devising methods of purification for materials used in the semiconductor industry. Heretofore, virtually all such schemes have shared a common feature: all of the material being purified is subjected to the same process. Since the impurities are normally present in only small amounts to begin with, it would be desirable to achieve further purification by some technique that would act only on the impurities while leaving the bulk of the reagent virtually unchanged.

Electronic grade silane (SiH₄) is in demand for use in the preparation of semiconductor devices and solar cells. The principal impurities which degrade the performance of devices fabricated using electronic grade SiH₄ are compounds which give rise to n- and p- type carriers. Thus, the presence of volatile compounds of the elements of Groups III and IV of the Periodic Table is especially pernicious. For SiH₄, the major impurities of these types are phosphine (PH₃), arsine (AsH₃), and diborane (B₂ H₆).

SUMMARY OF THE INVENTION

We have now found that impurities such as PH₃, AsH₃, and B₂ H₆ may readily be removed from silane by (a) irradiating silane vapor with ultraviolet radiation of a wavelength such that the absorption cross section of the impurity species is larger than that of SiH₄ and of sufficient intensity to photolyze impurities therein, and (b) removing the photolysis products from the silane. The 193 nm radiation from an ArF laser is quite suitable for this purpose.

Photolysis of the impurities results in products which are easily removed from the silane by standard physical or chemical techniques. While conventional purification methods exploit the small differences between the bulk physical properties of the contaminants and the silane, and thus achieve correspondingly small separation selectivity, the method of the present invention utilizes the differences in molecular properties to achieve separation selectivities which can be quite high.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The onset of absorption and subsequent photochemistry in SiH₄ occurs near 185 nm. This is such a high energy that nearly any contaminant species which might be present may be preferentially removed by photolysis in the ultraviolet at energies which do not affect the silane in any significant fashion. Various aspects of the ultraviolet photochemistry of PH₃, AsH₃, and SiH₄ have been reported in the literature. There is some disagreement concerning the primary photolytic step for PH₃, SiH₄, and B₂ H₆, as well as the subsequent free radical reactions for all these compounds. There is, however, very good agreement that the final photolysis products for PH₃, AsH₃, and B₂ H₆ are solid or polymeric materials. Thus, if an appropriate radiation is used which can be made to selectively excite the PH₃, AsH₃, and B₂ H₆ to dissociation but which would not adversely affect the SiH₄, these contaminants can effectively be removed from vapor phase SiH₄.

The photochemical conversion of the impurity species from gas phase compounds to solids can result in a dramatic increase in the efficiency of a conventional physical separation process such as distillation, due to the low volatility of solids relative to that of vapors. Indeed, it may often be the case that solid products have such low vapor pressure that even at room temperature they are effectively removed from vapor phase SiH₄. For example, in these experiments, this is precisely what happens. As one goes to lower levels of impurity, it may be necessary to perform a lower temperature distillation. Since the selectivity of the photochemical step may also be improved by cooling the photolysis cell (see below), it may be that both photochemical conversion and distillation can be carried out in the same reaction vessel.

The ArF laser provides a powerful and efficient ultraviolet source at 193 nm. To determine if PH₃, AsH₃, and B₂ H₆ could be selectively excited with an ArF laser in the presence of SiH₄, absolute absorption cross sections were measured for each of the four species over the region 190-202 nm. Since the spectra of each of these compounds in this wavelength region are pure continua, optical excitation results in dissociation. The spectra were obtained using a Cary model 17D spectrophotometer. To avoid absorption due to the Schumann-Runge bands of atmospheric O₂, both the sample and reference compartments were continuously purged with dry N₂. The absorption cell consisted of a 2 cm i.d. pyrex tube 10 cm long, with a Suprasil window o-ring-sealed to each end. The SiH₄ and PH₃ (Linde) as well as the AsH₃ (Matheson) were electronic grade. The B₂ H₆ was synthesized by Prof. R. T. Paine of the University of New Mexico. All of the gases were analyzed and found to be pure by gas chromatography. Their infrared spectra also did not show any sign of impurities. The gas pressures were measured with either a variable reluctance manometer (Validyne) or a precision Bourdon gauge (Texas Instruments). Since all of the gases studied are fairly reactive, a grease-free vacuum system was used. It was also necessary to carefully passivate the entire gas handling system to ensure reproducible results. However, once thoroughly passivated, a cell could be filled with SiH₄, AsH₃, or PH₃ and left for 24 hours with no detectable loss of gas. With B₂ H₆, less than 5% was lost during a 24-hour period. Since the time scale for all experiments was less than one hour, this slow loss of B₂ H₆ did not affect the results. Ultraviolet spectra were taken of the empty cell both before and after the SiH₄, PH₃, AsH₃ and B₂ H₆ spectra. These blank scans were identical and allowed correction for the small absorption of the cell windows. Since the gas pressure, cell length, and absolute absorbance were all measured, the absolute cross sections could be calculated. The ratio of absorption cross sections of PH₃, AsH₃, and B₂ H₆ relative to that of SiH₄ (i.e., the excitation selectivity), as well as the absolute cross sections for SiH₄ are given in Table I for the spectral region 190-202 nm. These data show that PH₃, AsH₃, and B₂ H₆ can indeed be preferentially excited in the presence of SiH₄ with the 193 nm ArF laser.

To determine how well these high excitation selectivites can be carried through into actual product separations, photolysis experiments were performed on binary mixtures of SiH₄ with PH₃, AsH₃, or B₂ H₆. For the SiH₄ :PH₃ and SiH₄ :AsH₃ mixtures, the quantitative analysis was performed using a gas chromatograph (Varian 90-P) equipped with a 250 cm long Porapak-Q column and a thermal conductivity detector. For SiH₄ :B₂ H₆ mixtures, an infrared spectrophotometer (Beckman IR-20A-X) was used for analysis. For both detection methods numerous calibration checks were made for linearity and reproducibility. The precision of each was always better than three percent. The procedure for a typical photolysis experiment was to fill the photolysis cell with the desired gas mixture and condense that mixture into a side arm with liquid N₂. The side arm was then closed off and the cell was placed in front of the 193 nm ArF laser.

                  Table I                                                          ______________________________________                                         Ratio of Absolute Absorption Cross-sections (σ) of PH.sub.3,             AsH.sub.3 and                                                                  B.sub.2 H.sub.6 Relative to that of SiH.sub.4, and the Absolute                Absorption Cross-                                                              section of SiH.sub.4 over the Region 190-202 nm.                               Wavelength                                                                              θ PH.sub.3 /                                                                       σ ASH.sub.3 /                                                                     σB.sub.2 H.sub.6 /                           (nm)     SiH.sub.4 SiH.sub.4                                                                               SiH.sub.4                                                                              SiH.sub.4 (cm.sup.2)                       ______________________________________                                         190      7.7 × 10.sup.3                                                                     1.0 × 10.sup.4                                                                    1.5 × 10.sup.2                                                                   2.2 × 10.sup.-21                     191      8.9 × 10.sup.3                                                                     1.2 × 10.sup.4                                                                    1.5 × 10.sup.2                                                                   1.8 × 10.sup.-21                     192      9.3× 10.sup.3                                                                      1.3 × 10.sup.4                                                                    1.6 × 10.sup.2                                                                   1.5 × 10.sup.-21                     193      10.sup.4  1.5 × 10.sup.4                                                                    1.8 × 10.sup.2                                                                   1.2 × 10.sup.-21                     194      1.2 × 10.sup.4                                                                     1.8 × 10.sup.4                                                                    1.9 × 10.sup.2                                                                   9.4 × 10.sup.-22                     195      1.4 × 10.sup.4                                                                     2.1 × 10.sup.4                                                                    2.1 × 10.sup.2                                                                   7.3 × 10.sup.-22                     196      1.5 × 10.sup.4                                                                     2.5 × 10.sup.4                                                                    2.3 × 10.sup.2                                                                   5.7 × 10.sup.-22                     197      1.7 × 10.sup.4                                                                     2.7 × 10.sup.4                                                                    2.5 × 10.sup.2                                                                   4.4 × 10.sup.-22                     198      1.8 × 10.sup.4                                                                     3.2 × 10.sup.4                                                                    2.7 × 10.sup.2                                                                   3.4 × 10.sup.-22                     199      2.0 × 10.sup.4                                                                     3.6 × 10.sup.4                                                                    2.8 × 10.sup.2                                                                   2.7 × 10.sup.- 22                    200      2.3 × 10.sup.4                                                                     4.2 × 10.sup.4                                                                    3.1 × 10.sup.2                                                                   2.0 × 10.sup.-22                     ______________________________________                                    

Typical laser output energies were 20 nJ at a 1-2 Hz repetition rate, as measured on a pyroelectric joulemeter (Gen Tec). The beam from this laser has a rectangular cross section, roughly 2 cm × 1 cm. The pulse width was typically 25 ns. The general design and construction of this type of laser have been described previously in the literature. By first measuring the laser energy with the cell in place and then opening the side arm to admit the sample while observing the transmitted laser energy, a rough estimate of the absorbed energy could be made. After photolysis, the sample was condensed either into a sample injection loop for subsequent gas chromatographic analysis, or into a cell for infrared analysis. Since H₂, along with some solid material, is a photolysis product, liquid He was used in order to quantitatively condense the volatile portion of the sample. The accuracy of the entire experimental procedure was confirmed using unphotolyzed samples, which were otherwise treated in precisely the same manner as the photolyzed samples. In order to test the feasibility of separation under conditions where virtually all collisions of the dissociation products would be with SiH₄, samples in which the SiH₄ :contaminant ratio was 100:1 were photolyzed under conditions where each laser pulse excited less than one percent of the impurity molecules present in the cell. The results of those experiments are presented in Table II. They clearly show that SiH₄ may be purified of AsH₃, PH₃ and B₂ H₆ with high selectivity. Within experimental error, the fraction of SiH₄ removed was the same for all three impurity species.

Experiments were also performed at SiH₄ :contaminant ratios of 10:1. In these experiments a larger fraction of SiH₄ is destroyed, so a more accurate measure of the number of SiH₄ molecules removed for each contaminant molecule removed could be made.

                  Table II                                                         ______________________________________                                         RESULTS OF ArF LASER PHOTOLYSIS OF                                             VARIOUS 100:1 SiH.sub.4 CONTAMINANT MIXTURES                                                               Fraction                                                                       Of Contaminant                                     Contaminant   Fraction of   Species                                            Species       SiH.sub.4 Photolyzed                                                                         Photolyzed                                         ______________________________________                                         AsH.sub.3.sup.a                                                                              0.01          >0.99                                              PH.sub.3.sup.a                                                                               0.06          0.44                                               B.sub.2 H.sub.6.sup.b                                                                        0.02          0.42                                               ______________________________________                                          .sup.a SiH.sub.4 pressure 10 torr                                              .sup.b SiH.sub.4 pressure 100 torr                                       

These data, along with the quantum yields for destruction of the contaminant species are given in Table III. Only for PH₃ has the quantum yield been previously measured. Given the inaccuracy inherent in the method of measuring the energy absorbed, the quantum yield obtained, 0.35, compares quite favorably with the literature value of 0.56. The fact that approximately one SiH₄ molecule is lost per contaminant molecule dissociated augurs well for maintaining the high excitation selectivity. The reaction

    H + SiH.sub.4 → H.sub.2 + SiH.sub.3 ,               (1)

is known to be quite fast, and the primary photolysis steps for PH₃, AsH₃, and B₂ H₆ are thought to include

    PH.sub.3 + hν → PH.sub.2 + H,                    (2)

    asH.sub.3 + hν → AsH.sub.2 + H,                  (3)

and

    B.sub.2 H.sub.6 + hν → B.sub.2 H.sub.5 + H.      (4)

                  table III                                                        ______________________________________                                         The Number of SiH.sub.4 Molecules Removed For Each                             Contaminant Molecule Removed, And The Quantum                                  Yields For Removal Of The Contaminant Species                                             Number of SiH.sub.4                                                            Molecules Lost                                                      Contaminant                                                                               Per Contaminant Quantum Yield                                       Species    Molecule Removed                                                                               For Removal                                         ______________________________________                                         PH.sub.3.sup.a                                                                            1.2             0.35                                                AsH.sub.3.sup.a                                                                           1.3             0.42                                                B.sub.2 H.sub.6.sup.b                                                                     1.1              0.15.sup.c                                         ______________________________________                                          .sup.a SiH.sub.4 pressure 1 torr                                               .sup.b SiH.sub.4 pressure 10 torr                                              .sup.c Lower limit                                                       

The number of SiH₄ molecules lost per contaminant molecule dissociated, as shown in Table III, suggests that an H atom produced via reaction (2), (3), or (4) abstracts an H from SiH₄ and that very little further free radical scrambling occurs, even under conditions where the SiH₄ is in great excess. Thus, it appears that the controlling factor in determining the achievable selectivity of removal, even at the 10-100 ppb level useful for practical application, is the excitation selectivity. Although the demonstrated excitation selectivities shown in Table I are already quite high, they may be improved still further. Since the SiH₄ absorption which influences the selectivity is on the long wavelength tail of the main SiH₄ absorption band, and since the cross section in this long wavelength region is very weak relative to that at band center, the SiH₄ absorption at 193 nm appears to be due primarily to absorption from the small fraction of SiH₄ molecules which are not in the ground vibrational state at room temperature. Thus, cooling the gas can be expected to improve the excitation selectivities.

The foregoing examples are merely illustrative of preferred embodiments of the invention and do not limit in any way the scope of the invention. It will be understood that the scope of the invention is as set forth in the Summary of the Invention and encompassed by the broad claims appended hereto. 

What we claim is:
 1. A method of purifying silane which comprises (a) irradiating said silane with ultraviolet radiation of sufficient intensity to photolyze impurities therein, and (b) removing the photolysis products from said silane.
 2. The method of claim 1 wherein said ultraviolet radiation is in the spectral range of 190 to 202 nm.
 3. The method of claim 2 wherein said ultraviolet radiation is 193 nm radiation from an ArF laser.
 4. The method of claim 1 wherein said silane is cooled before it is irradiated.
 5. A method of removing PH₃, AsH₃, and B₂ H₆ from silane which comprises (a) irradiating said silane with ultraviolet radiation of sufficient intensity to photolyze said PH₃, AsH₃, and B₂ H₆, and (b) removing the photolysis products from said silane.
 6. The method of claim 5 wherein said ultraviolet radiation is in the spectral range of 190 nm to 202 nm.
 7. The method of claim 5 wherein said ultraviolet radiation is 193 nm radiation from an ArF laser.
 8. The method of claim 5 wherein said silane is cooled before it is irradiated. 